| |
 |
| Flat
Panel Display | Semiconductor
| Life
Science
|
| |
CSUN MFG LTD. HSP.
' s 300 mm Load Port, Frontier, is an economic solution for
FOUPs (Front Opening Unified Pod) compatible interface. low
cost of ownership.
The Frotier gives semiconductor tool equipment manufacturers
a reliable solution to integrate with any tool.
|
| |
Function
| • |
Load Port is integrated to a
tool directly to dock the FOUP and open the FOUP door
without contaminating the wafers inside the FOUP. |
Features
| • |
Dimension:
1386x471x594mm |
| • |
Weight
& Noise: less than 60Kg/68dB |
| • |
Adjustment:
±10mm for height |
| • |
Standard
compliance: Conform to SEMI Standard E1.9, E15.1, E47.1,
E57, E62, E63, E64, S2 and S8 |
| • |
Cycle
Time: <18 sec. |
| • |
Communication:
ASCII, SECS I/II |
| • |
Indicators:
Four LED indicators (FOUP Present, FOUP In-Place, Ready,
Error) |
| • |
Sensors:
Independent FOUP present、 in-place and Finger pinch
sensors |
| • |
Wafer
protrusion protection |
| • |
Facilities:
24VDC @ 5A, Vacuum air |
| • |
Cleanliness:
better than class 1 |
| • |
Reliability:
MTTR<30 min., MCBF>100,000 cycles |
Benefits
| • |
Low
Cost of Ownership |
| • |
Easy
Integration to tools |
| • |
Easy
Installation
o First time installation: < 1 hour |
| • |
Easy
Maintenance
o De-mounting, remounting, and re-alignment
< 15 min. |
| • |
Patented
design to reduce particle contamination during FOUP
door open and close |
|
| |
 |
| |
| Back |
|
|
|
|
| |
