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300 mm EFEM (Equipment Front End Module)

CSUN MFG LTD. HSP.'s 300 mm front-end module enables automation solution for semiconductor tool manufactures. This state of the art and unique design renders minimum maintenance and thus very cost effective.

The flexibilities of the software architecture make it very powerful to hand-shake versatile types of hardware components, including Robot, Load Port, Pre-aligner.., and custom tailored components.

 
 
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