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| Flat
Panel Display | Semiconductor
| Life
Science
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| 300 mm EFEM (Equipment Front
End Module)
CSUN MFG LTD. HSP.'s
300 mm front-end module enables automation solution for
semiconductor tool manufactures. This state of the art and
unique design renders minimum maintenance and thus very
cost effective.
The flexibilities of the software
architecture make it very powerful to hand-shake versatile
types of hardware components, including Robot, Load Port,
Pre-aligner.., and custom tailored components.
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